Streamlined design improves dispense performance and flush-up time
BILLERICA, Massachusetts, July 11, 2017 /PRNewswire/
-- Entegris, Inc. (NASDAQ: ENTG),
a leader in world-class specialty materials, announced today its new Integra® Plus WS (weir style) family of fluid management valves. Created for use with
corrosive chemicals in semiconductor processing applications, the new valves are constructed from high-purity, chemically
resistant PFA and PTFE and feature a streamlined design to keep the flow path clean and free from contaminants. In addition, its
single-piece diaphragm design eliminates potential separation, increasing valve life and reducing downtime for changeouts. As a
result, the new Integra valves enable customers to manage high-flow, bulk chemical delivery with improved process
reliability.
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"The new Integra valves are optimal for today's larger semiconductor manufacturing facilities that utilize higher chemical
volumes, requiring bulk chemical distribution systems with high-flow capabilities, said Senior Vice President and General Manager
of the Advanced Materials Handling Division for Entegris, Bill Shaner. "Additionally, the Integra
valves offer a smaller footprint – yet still provide high-flow capacity -- and can minimize dead volume to enable quick
chemical system flush-up."
The new valves also provide:
- A CV flow over 25 -- more than twice that of typical poppet-style valves
- Single-piece diaphragm construction, eliminating potential diaphragm separation
- Forward- and backward-compatible configuration for easy, mistake-proof installation
- Two-way configurations with either manual multi-turn or pneumatic "normally closed"
or "normally open" actuators
Integra Plus WS valves are available now with fully characterized standard PrimeLock®, Flaretek® "SpaceSaver" and PureBond® pipe port connections. They provide system flexibility and easy installation into
any fluid handling system.
For more information, please visit the Entegris product display area during SEMICON® West at the W Hotel near the Moscone
Center in San Francisco, July 11 -- 13, or visit the product web page at
www.entegris.com/integraplusws.
About Entegris
Entegris is a leader in specialty chemicals and advanced materials solutions for microelectronics industry, life sciences and
other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in
the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information may be found
at www.entegris.com.
Company Contact:
Andrew DePoy
Brand and Marcom Manager
T +1 480 290 8748
andrew.depoy@entegris.com
Media Contact, North America and Europe
:
Lora Martinez
Kiterocket
+1 303 941 6110
lmartinez@kiterocket.com
Media Contact, Asia:
Ina Chu
Impress Labs
+1 217 766 1011
ina@impresslabs.com
SOURCE Entegris, Inc.